Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate
During the process of heteroepitaxial growth, if the lattice constant of the growing film differs from that of the substrate, the wafer surface bows, regardless of whether the lattice mismatch occurs or not. As the growth in large-scale wafers speeds up, bowing effects are becoming more and more imp...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2013-01-01
|
Series: | Advances in Condensed Matter Physics |
Online Access: | http://dx.doi.org/10.1155/2013/465498 |
id |
doaj-dbe64cf0645b4772a5e0d86e5bceac54 |
---|---|
record_format |
Article |
spelling |
doaj-dbe64cf0645b4772a5e0d86e5bceac542020-11-24T22:41:24ZengHindawi LimitedAdvances in Condensed Matter Physics1687-81081687-81242013-01-01201310.1155/2013/465498465498Simulation and Analysis of GaN Wafer Bowing on Sapphire SubstrateWang Bin0Qu Yu-xuan1Hu Shi-gang2Tang Zhi-jun3Li Jin4Hu Ying-lu5The Center of Coordination and Support of State Administration of Science, Technology and Industry for National Defence, Beijing 100081, ChinaAdvanced Technology Generalization Institute of CNGC, Beijing 100089, ChinaSchool of Information and Electrical Engineering, Hunan University of Science and Technology, Xiangtan 411201, ChinaSchool of Information and Electrical Engineering, Hunan University of Science and Technology, Xiangtan 411201, ChinaSchool of Information and Electrical Engineering, Hunan University of Science and Technology, Xiangtan 411201, ChinaThe 41st Institute of China Electronics Technology Group Corporation, Qingdao 266555, ChinaDuring the process of heteroepitaxial growth, if the lattice constant of the growing film differs from that of the substrate, the wafer surface bows, regardless of whether the lattice mismatch occurs or not. As the growth in large-scale wafers speeds up, bowing effects are becoming more and more important. Wafer bowing has a direct impact on the yield in modern mass-production compound semiconductor industries. By using finite element analysis software, the bowing deformation of the GaN wafer on sapphire substrate can be studied. This paper summarizes the causes of bowing deformation, builds the mathematical model, and deduces the relation equation of the wafer bowing. The results show that epitaxial wafer bowing has a linear relationship with the square of the diameter of the substrate but has little relationship with the thickness of the substrate. Moreover, the relation equation of the wafer bowing is also simplified finally.http://dx.doi.org/10.1155/2013/465498 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Wang Bin Qu Yu-xuan Hu Shi-gang Tang Zhi-jun Li Jin Hu Ying-lu |
spellingShingle |
Wang Bin Qu Yu-xuan Hu Shi-gang Tang Zhi-jun Li Jin Hu Ying-lu Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate Advances in Condensed Matter Physics |
author_facet |
Wang Bin Qu Yu-xuan Hu Shi-gang Tang Zhi-jun Li Jin Hu Ying-lu |
author_sort |
Wang Bin |
title |
Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate |
title_short |
Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate |
title_full |
Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate |
title_fullStr |
Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate |
title_full_unstemmed |
Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate |
title_sort |
simulation and analysis of gan wafer bowing on sapphire substrate |
publisher |
Hindawi Limited |
series |
Advances in Condensed Matter Physics |
issn |
1687-8108 1687-8124 |
publishDate |
2013-01-01 |
description |
During the process of heteroepitaxial growth, if the lattice constant of the growing film differs from that of the substrate, the wafer surface bows, regardless of whether the lattice mismatch occurs or not. As the growth in large-scale wafers speeds up, bowing effects are becoming more and more important. Wafer bowing has a direct impact on the yield in modern mass-production compound semiconductor industries. By using finite element analysis software, the bowing deformation of the GaN wafer on sapphire substrate can be studied. This paper summarizes the causes of bowing deformation, builds the mathematical model, and deduces the relation equation of the wafer bowing. The results show that epitaxial wafer bowing has a linear relationship with the square of the diameter of the substrate but has little relationship with the thickness of the substrate. Moreover, the relation equation of the wafer bowing is also simplified finally. |
url |
http://dx.doi.org/10.1155/2013/465498 |
work_keys_str_mv |
AT wangbin simulationandanalysisofganwaferbowingonsapphiresubstrate AT quyuxuan simulationandanalysisofganwaferbowingonsapphiresubstrate AT hushigang simulationandanalysisofganwaferbowingonsapphiresubstrate AT tangzhijun simulationandanalysisofganwaferbowingonsapphiresubstrate AT lijin simulationandanalysisofganwaferbowingonsapphiresubstrate AT huyinglu simulationandanalysisofganwaferbowingonsapphiresubstrate |
_version_ |
1725702240356794368 |