Regularities of microdefect formation in silicon during heat treatment for internal getter synthesis
Gettering is defined as a process by which metal impurities in the device region are reduced by localizing them in predetermined, passive regions of the silicon wafer. Internal or intrinsic gettering is an effective way to reduce the contamination in active regions. The generation of...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2019-09-01
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| Series: | Modern Electronic Materials |
| Online Access: | https://moem.pensoft.net/article/52812/download/pdf/ |