An Overview of High-k Oxides on Hydrogenated-Diamond for Metal-Oxide-Semiconductor Capacitors and Field-Effect Transistors

An Overview of High-k Oxides on Hydrogenated-Diamond for Metal-Oxide-Semiconductor Capacitors and Field-Effect Transistors

Thanks to its excellent intrinsic properties, diamond is promising for applications of high-power electronic devices, ultraviolet detectors, biosensors, high-temperature tolerant gas sensors, etc. Here, an overview of high-k oxides on hydrogenated-diamond (H-diamond) for metal-oxide-semiconductor (M...

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Bibliographic Details
Main Authors: Jiangwei Liu, Yasuo Koide
Format: Article
Language:English
Published: MDPI AG 2018-06-01
Series:Sensors
Subjects:
diamond
high-k
MOS capacitor
MOSFET
gas sensors
Online Access:http://www.mdpi.com/1424-8220/18/6/1813

Internet

http://www.mdpi.com/1424-8220/18/6/1813

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