Research on influences of contact force in chemical mechanical polishing (CMP) process
A series of simulations of chemical mechanical polishing (CMP) were conducted to investigate the contact force between abrasive particles and specimens by using the finite element method (FEM). In this paper, a micro-contact model, which only involves the mechanical interactions, was set up to simul...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2015-04-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4903700 |