Reducing virtual source size by using facetless electron source for high brightness
Brightness of an electron source is key for the high spatial resolution of electron microscopy and analysis. A small source size is essential for high brightness, and it has been achieved by using small crystal facets; however, the emission current is reduced when the facet area is decreased. To ach...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5098528 |