A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device

A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device

This paper reports a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8. The method is based on epoxide opening and dehydration reactions between surface-modified PDMS and SU-8. A PDMS replica is first activated via the low-cost lab equipment, i.e., the oxygen plasm...

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Bibliographic Details
Main Authors: Zhen Zhu, Pan Chen, Kegang Liu, Carlos Escobedo
Format: Article
Language:English
Published: MDPI AG 2016-12-01
Series:Micromachines
Subjects:
bonding
PDMS
SU-8
microfluidics
multifunctional integration
cell trapping
negative dielectrophoretic (nDEP)
impedance measurement
Online Access:http://www.mdpi.com/2072-666X/7/12/230

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