Size Effects of Poly-Si Formed by Laser Annealing With Periodic Intensity Distribution on the TFT Characteristics
Currently, low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs), which are characterized by high mobility of electrons, are fabricated by excimer laser annealing. High mobility in low-temperature polycrystalline silicon is achieved by controlling the grain size to approximatel...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2021-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9475478/ |