Thermal Microactuators for Microelectromechanical Systems (MEMS)

Thermal Microactuators for Microelectromechanical Systems (MEMS)

Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical sy...

Full description

Bibliographic Details
Main Author: Cragun, Rebecca
Format: Others
Published: BYU ScholarsArchive 2003
Subjects:
MEMS
microelectromechanical systems
compliant micromechanism
compliant mechanism
thermal actuator
microactuator
thermal expansion device
themomechanical inplane micromechanisms
thermal expansion
Mechanical Engineering
Online Access:https://scholarsarchive.byu.edu/etd/54
https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1053&context=etd

Internet

https://scholarsarchive.byu.edu/etd/54
https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1053&context=etd

Similar Items