Robust mask-layout and process synthesis in micro-electro-mechanical-systems (MEMS) using genetic algorithms
This thesis reports a Genetic Algorithm approach for the mask-layout and process flow synthesis problem. For a given desired target shape, an optimal mask-layout and process flow can be automatically generated using the Genetic Algorithm synthesis approach. The Genetic Algorithm manipulates and evol...
Internet
https://thesis.library.caltech.edu/3279/1/Ma_l_2001.pdfMa, Lin (2001) Robust mask-layout and process synthesis in micro-electro-mechanical-systems (MEMS) using genetic algorithms. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/e8hm-z754. https://resolver.caltech.edu/CaltechETD:etd-08302005-131428 <https://resolver.caltech.edu/CaltechETD:etd-08302005-131428>