A Probing System with Replaceable Tips for Three Dimensional Nano-Metrology
With increase in the number of three dimensional (3-D) nanometer-scale objects that are being either fabricated or studied, there is a need to accurately characterize their geometry. While the Atomic force microscope (AFM) is a versatile tool for performing nano-metrology, it suffers from issues of...
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| Language: | en_US |
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2018
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| Online Access: | http://etd.iisc.ernet.in/2005/3711 http://etd.iisc.ernet.in/abstracts/4581/G28317-Abs.pdf |