Novel machine learning approaches for modeling variations in semiconductor manufacturing

Novel machine learning approaches for modeling variations in semiconductor manufacturing

Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2017. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 89-96). === In the competitive semiconductor manufacturing industry where large amounts of da...

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Bibliographic Details
Main Author: Chen, Hongge, Ph. D. Massachusetts Institute of Technology
Other Authors: Duane S. Boning.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2017
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/111911

Internet

http://hdl.handle.net/1721.1/111911

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