Deposition and characterization of silicon-germanium alloy thin films on oxide
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (p. 177-187). === by Julie Ann Tsai. === Ph.D.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/11511 |