Scanned pulsed laser annealing of Cu thin films
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, February 2005. === Includes bibliographical references (leaves 51-52). === As the microelectronics industry has moved to Cu as the conductor material, there has been much research into microstructure co...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/30257 |