Accurate capacitive metrology for atomic force microscopy
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005. === Includes bibliographical references (p. 219-224). === This thesis presents accurate capacitive sensing metrology designed for a prototype atomic force microscope (AFM) originally developed in the MIT Pre...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/33912 |