Gas-phase cleaning of silicon wafer surfaces

Gas-phase cleaning of silicon wafer surfaces

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997. === Includes bibliographical references. === by Andrew Soctt Lawing. === Ph.D.

Bibliographic Details
Main Author: Lawing, Andrew S. (Andrew Scott)
Other Authors: Herbert H. Sawin.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Chemical Engineering
Online Access:http://hdl.handle.net/1721.1/38852

Internet

http://hdl.handle.net/1721.1/38852

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