Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. === Includes bibliographical references (leaves 103-108). === by V.T. Srikar. === Ph.D.
Main Author: | Srikar, V. T. (Vengallatore Thattai), 1972- |
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Other Authors: | Carl V. Thompson. |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2014
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/85249 |
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