MEMS amplification of piezoelectric strain for in-plane actuation

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. === Includes bibliographical references (p. 61-63). === by Nicholas J. Conway. === S.M.

Bibliographic Details
Main Author: Conway, Nicholas J. (Nicholas James), 1979-
Other Authors: Sang-Gook Kim.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2014
Subjects:
Online Access:http://hdl.handle.net/1721.1/89382