Reduction of process monitoring in semiconductor chip manufacturing
Thesis (M.B.A.)--Massachusetts Institute of Technology, Sloan School of Management; and (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. === Includes bibliographical references (leaf 40). === This thesis concerns in-line inspection scheduling...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9742 |