The investigation of structures, defects and electrical properties in GaAs films grown by metalorganic chemical vapor deposition at low temperatures and implanted by arsenic ions
博士 === 國立交通大學 === 光電工程研究所 === 84 === In this dissertation, the investigations of structures, defects and electrical properties are performed in GaAs films with high resistivity grown by metalorganic chemical vapor deposition (MOCVD) at low temperatures an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31341354609842449701 |