AlSiCu/TiN/Ti Contact System on VLSI
碩士 === 國立交通大學 === 電子研究所 === 84 === This thesis is to realize AlSiCu/TiN/Ti multilayed contact system on the CMOSprocess below one-micron. Electrical properties including contact resistivityand reverse bias junction leakage current have been...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98319333114694554598 |