| Summary: | 碩士 === 國立交通大學 === 電子研究所 === 84 === This thesis presents the comb actuators in surface
micromachining. The goal ofthis thesis is to establish a
foundation for electrostatically exciting and sensing
suspended transducer elements based on comb-drive structure,
with the viewpoint on potential resonant sensor and actuator
applications. Anisotropic etching with RIE process is used to
improve electric field coupling. Besides, high phosphorus-doped
concentration can offer more free electron to build up high
electric attractive force between two electrodes. To avoid
sticking problem, the low stress of thin film is needed.
LPCVD polysilicon annealed at 1050℃ was adopted for the
reduction of film stress.
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