Surface micromachined piezoresistive pressure sensor
碩士 === 國立臺灣大學 === 應用力學研究所 === 84 === Surface micromachined piezoresistive pressure sensor has been designed, modeled, and fabricated. The optimal position, orientation, and length of effective resistors on circular and square plate have bee...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58138727480873005145 |