The Effects of NH3 and N2O on Interpoly Dielectric
碩士 === 國立交通大學 === 電子工程學系 === 85 === This thesis is focused on the exploration of improving the quality of interpoly dielectric. The gases which are used for growing dielectric are O2 and TEOS. According to the processes, we can divide it in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80272659950586773609 |