Electrically thermal-actuated silicon-membrane micro-valve

• Main Authors: Chen, Chien-Hung, 陳建宏
• Other Authors: Kow-Ming Chang
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/30974532951173231141

碩士 === 國立交通大學 === 電子工程學系 === 85 === In the research of microactuators in the Micro-Electro- Mechanical-System(MEMS), thermal actuation of integrated valve structure is valued and attractivedue to the relative simplicity of actuator design, the larger actuation range,the smaler dimension allowed, the relatively low total power required and integratable with other sensing components,such as flow or pressure sensors,to fabricate a flow or pressure controller. The structure of this microvalve we propose consists of polysilicon/SiO2/ Silicon membrane sandwich. With the different coefficients of thermal expansion in the sandwich structure, the membrane buckles due to the increase of temperature. We can easily control the actuation by supplying electric voltage. Besides, for very small structures, thermal actuation becomes more attractive due to the geometrical advantages of scaling down. In this thesis, a membrane-type micromachined silicon micro-valve hasbeen developed. The design considerations, the fabrication process and the experimental results are discussed.