Study of Preparation of PLT Thin Film and Properties of Electrode
碩士 === 國立成功大學 === 材料科學(工程)學系 === 86 === RF magnetron sputtering deposition of LaNiO3 conductive thin film on N-type Si wafer and Platinium electrode was studied. Properties of the thin film under difference deposition condition, including d...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/93043208395576420549 |