| Summary: | 碩士 === 國立中山大學 === 光電工程學研究所 === 86 === This work is aimed to fabricate a bi-directional anti-resonant reflecting optical waveguide (ARROW) by using semiconductor processes. In the plane normal to the light propagation direction,the waveguide has Fabry-Perot (FP) reflectors in both transversedirections to confine the optical field inside the core layer.In the vertical direction, the SiO2/Ta2O5/ SiO2 ARROW structurehas a 25% coupling efficiency, under He-Ne laser operation, with a 6.5mm waveguide length. In the lateral direction, the FP reflectoris achieved by dry etching techniques to form 1 mm-wide ridge structures.
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