The Characterization and Fabrication of Integrated PZT Thin Film Pyroelectric Infrared Sensor with Different Thickness Substrate
碩士 === 國立海洋大學 === 電機工程學系 === 86 === Lead-Zirconate-Titanate(Pb(Zr0.52Ti0.48)O3,PZT) thin film is deposited on the junction effect field transistor(JFET) with the radio frequency magnetron planer sputtering system to fabricated and a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59800087826382111887 |