The study of sillicon dioxide grown on GaAs substrate by liquid phase deposition and fabrication of GaAs MOSFET
碩士 === 國立成功大學 === 電機工程學系 === 87 === Over the years, various kinds of insulating layers and deposition techniques have been proposed and investigated. However, silicon oxide is the most widely used insulator in semiconductor devices as the gate insulator of metal-oxide-semiconductor (MOS)...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34627231110121340020 |