A Study of Rework Strategy for Photolithography in Wafer Fabrication Factory
碩士 === 國立交通大學 === 工業工程與管理系 === 87 === In the wafer fabrication factory, a fraction of the batch, or lot may require reworking because its members fail to conform to standards. It is usually unable to rework when a defective batch happened. In photolithography area, it is possible to deal with these...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78872564273131896569 |