The effect of annealing in laser ablation for epitaxial processing of thin film

碩士 === 國立交通大學 === 電子物理系 === 87 === Our goal is investigating homoepitaxy of thin film with as-polished SrTiO3 substrate under the deposition of Laser MBE, and using Reflection High Energy Electron Diffraction to in-situ monitor the evolution of thin film growth. With the characteristic fe...

Full description

Bibliographic Details
Main Authors: Yueh-Fen Chen, 陳月芬
Other Authors: Y. S. Gou
Format: Others
Language:zh-TW
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/84675206506409484858