| Summary: | 碩士 === 國立彰化師範大學 === 工業教育學系 === 87 === The piezoelectric material of aerostatic bearing via active positioning motion compensation is studied. Micro-positioning systems using piezoelectric actuators have a very wide range of applications including ultra-precision machine tools. The synergetic integration of mechanical engineering, electrical engineering and electronics in conjunction with high precision smart material and control technology is also examined . The externally presurized gas bearing was used in the fields of precision engineering, specially for the characteristics of high precision, low friction and high speed.
The purpose of this study is to use the piezoelectric materials, which was able to have the fast response characteristics and fine positioning motion ability, which can be applied with the PCB drilling machine. The PCB table is actively compensated by the piezoelectric air bearing component in the future.
In order to reach this purpose, a direct current Battery Charger Device is conductedfirst. Digital feature based power amplifier having a feedback control current compensation is achieved by the research development. An experimental study of active power compensation technique for high-precision positioning control involving the use of a
Stacked type and multilayer type piezoelectric actuators are presented. In this thesis, one presents a novel implementation of applying a direct current battery charger device for the power consumption of developed piezoelectric actuator (PZT) utilized for precision motion control. Emphasis is placed here on controlling the PZT via the development of high-speed power amplifier by Battery Charger Device together with D/A interfacing and operational amplifier circuitry. The result shows that the power amplification has the stable ability of output constant linear voltage for driving the piezoelectric material under the condition of free load or load. The feedback current loop of the driver shows the abilities of ultra-precision and high-speed power supply. Characteristic micro-displacement of developed stacked type and multilayer piezoelectric actuators are experimentally tested.
Keyward: Piezoelectric Actuator、Micrometer Displacement
、Precision Motion
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