Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films

碩士 === 國立清華大學 === 材料科學工程學系 === 87 ===

Bibliographic Details
Main Authors:	M.H.Lin, 林明樺
Other Authors:	L.H.Chou
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/85325867425931215563

id	ndltd-TW-087NTHU0159061
record_format	oai_dc
spelling	ndltd-TW-087NTHU01590612016-07-11T04:13:20Z http://ndltd.ncl.edu.tw/handle/85325867425931215563 Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films 基板偏壓對非晶碳氫薄膜微結構,物性影響研究 M.H.Lin 林明樺碩士國立清華大學材料科學工程學系 87 L.H.Chou 周麗新 1999 學位論文 ; thesis 100 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學工程學系 === 87 ===
author2	L.H.Chou
author_facet	L.H.Chou M.H.Lin 林明樺
author	M.H.Lin 林明樺
spellingShingle	M.H.Lin 林明樺 Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
author_sort	M.H.Lin
title	Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
title_short	Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
title_full	Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
title_fullStr	Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
title_full_unstemmed	Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
title_sort	effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
publishDate	1999
url	http://ndltd.ncl.edu.tw/handle/85325867425931215563
work_keys_str_mv	AT mhlin effectsofsubstratebiasonthemicrostructuresandphysicalpropertiesofhydrogenatedamorphouscarbonthinfilms AT línmínghuà effectsofsubstratebiasonthemicrostructuresandphysicalpropertiesofhydrogenatedamorphouscarbonthinfilms AT mhlin jībǎnpiānyāduìfēijīngtànqīngbáomówēijiégòuwùxìngyǐngxiǎngyánjiū AT línmínghuà jībǎnpiānyāduìfēijīngtànqīngbáomówēijiégòuwùxìngyǐngxiǎngyánjiū
_version_	1718342785781727232

Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films

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