Effects of substrate bias on the microstructures and physical properties of hydrogenated amorphous carbon thin films
碩士 === 國立清華大學 === 材料科學工程學系 === 87 ===
Main Authors: | M.H.Lin, 林明樺 |
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Other Authors: | L.H.Chou |
Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/85325867425931215563 |
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