Investigation of ZnSe/Si Metal-Semiconductor-Metal (MSM) Photodetector Using IR Furnace Chemical Vapor Deposition
碩士 === 國立海洋大學 === 電機工程學系 === 87 === -Abstract- In this experiment, we use the low cost IR-CVD system and two-step growth method to grow ZnSe epilayers on oriented-(111) Si substrate for reducing the lattice mismatch problem between ZnSe and Si. Because of the existence of the l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29772847564015235938 |