MEMS Accelerometer Design
碩士 === 中華大學 === 機械與航太工程研究所 === 88 === Several kinds of MEMS accelerometers are proposed by using the UMC standard fabrication process. Firstly, the IntelliSuite software package is applied for the process simulation. Secondly, the ANSYS software package is used for the accelerometer proof mass displ...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13434599323520473766 |