The fabrication and characterization of LaCuO3
碩士 === 國立清華大學 === 材料科學工程學系 === 88 === The experiment mixed La2O3 and CuO to make a series of targets with different composition.Useing Rf sputter system to deposite and characterize LaCuO3 thin film in different condition (deposition temperature、Ar/O2、work pressure and annealing temperatu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19757936705213265790 |