EPC Application in IC Manufacturing Process
碩士 === 中原大學 === 工業工程研究所 === 89 === Recently, the semiconductor industry in Taiwan grows up very rapidly, and plays the key role in the global market. The 0.13μm manufacturing technology has approved in the production line. And the twelve-inch Fab.(Fabrication) also gradually replaces the eight-inch...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95551096585226846691 |