Influence of pulsed plasma on properties of DLC thin films
碩士 === 國立中興大學 === 材料工程學研究所 === 89 === Abstract Application of steady direct current （DC）power to reactive sputtering of dielectrics such as Al2O3 and Diamond-like carbon（DLC）is seriously hampered by arcing. In the deposition processing, insulated layers charge up until breakdown occurs in...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75813616618671098521 |