Evaluation of Microcontamination on Device Characteristics
碩士 === 國立交通大學 === 電子工程系 === 89 === As the increased sensitivity of the semiconductor manufacturing process to airborne molecular contamination (AMC), the researches on cleanroom contamination behavior and their impact on device performance are broadly pursued. In this thesis, we detected most airbor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10401715975555959141 |