鍺銻合金薄膜鉻及釩元素滲雜之製程微結構
碩士 === 國立清華大學 === 材料科學工程學系 === 89 === This study is to observe effects of chromium and vanadium element doping on the microstructures and physical properties of germanium- antimony alloy films. All films, CrX（GeSb9）1-X （X≦15.5at.%）and（GeSb9）1-XVX（X≦6.7at.%）, were deposited with DC magnet...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/33277594926618968871 |