Control System Design and Experimanetal Verification of an Equivalent MEMS Electrostatic Actuator
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === Electrostatic actuators are important driving elements for microelectromechanical systems (MEMS). However, their working range is usually limited by pull-in instability. In addition, the uncertainties and nonlinearity from fabrication and structural characteri...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/624u33 |