Design of Dispatching Rule for Photolithography Area in Wafer Fabrication Factories with Rework Considerations
碩士 === 國立交通大學 === 工業工程與管理系 === 90 === Semiconductor industry is one of the most leading edge industry in Taiwan. Generally, the process flow of wafer fabrication may contain 300~400 steps or operations. It is complicated and filled with uncertainties, like hot order, rework lot, machine down and so...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45192617380746008491 |