鈦酸鍶鋇雙靶共濺鍍薄膜製程暨微結構、性質研究
碩士 === 國立清華大學 === 材料科學工程學系 === 90 === Barium strontium titanate (Ba1-xSrxTiO3, BST) thin film is one of the most promising materials for infrared detectors because of its high dielectric constant and pyroelectric coefficient. In order to reduce material thickness and increase detector sen...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22819552549904406257 |