Study of Electromigration of Sputtered Ti, TiN and Al-Alloy in IC Metallization
碩士 === 國立清華大學 === 工程與系統科學系 === 90 === This research focused on (1) the effect of substrate (oxide) on the preferred orientation of Ti , and the relationship of orientation among Ti , TiN and Al films, (2) the effect of processing parameter on the Al film properties and electromigration pe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46805646818839192399 |