IC FABRICATION UNDER INTERVAL-SMOOTHNESS FLOW CONTROL TECHNIQUE

碩士 === 東海大學 === 數學系 === 90 === Abstract This paper is the continuation of a series study led by Dr. Liu which is about the design of flow-control technique and simulation programming of IC fabrication system. We propose a new flow-control technique called "the interval-smoothness...

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Bibliographic Details
Main Authors: ChaoChing Wang, 王朝慶
Other Authors: L.Liu
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/94276414709078829097