Optical Element of Micro-Optical Pickup Head

碩士 === 國立中央大學 === 光電科學研究所 === 91 === A new optical pickup head is introduced, with its optical components fabricated by the microoptoelectromechanical (MOEMS) technology. Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film wa...

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Bibliographic Details
Main Authors: Yu-Cheng Chang, 張育誠
Other Authors: Jeng -Yang Chang
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/97208650079957687607