Study of Optical Interferometry for the Precision Measurement
碩士 === 國立彰化師範大學 === 機電工程學系 === 91 === This paper proposes three optical measurement methods for determining the aerostatic spindle run-out and the dynamic contour error of a CNC machine tool. These techniques include a frequency-modulated heterodyne interferometric method, an one-frequency Michelson...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36803257812950626400 |