Design and application of CMOS comb-driver actuator
碩士 === 國立中興大學 === 機械工程學系 === 92 === This paper presents fabrication a variable capacitor and a XY-stage with comb-driver. The variable capacitor has greater linear tuning range employed comb-driver to drive the top electrode displacement, that bring overlap area change. As well as the XY-stage have...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01884896575014915640 |