Fabrication of gas sensors using the sol-gel method deposited SnO2 film
碩士 === 國立中興大學 === 精密工程研究所 === 92 === This study investigates the fabrication of a gas sensor using the TSMC .35 2P4M standard process. The structure of the gas sensor contains the N and P type poly-silicon series and a sensing film. The N type layer deposit the oxide layer and the P type...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71853589349206348633 |