Analysis and Design of a Novel PZT Microactuator
碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 92 === Due to the coupling effect, the design and simulation of piezoelectric micro-actuators are more difficult as compared to that of thermal microactuators and electrostatic microactuators. Piezoelectric material has several advantages for designing...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/05113494615776790177 |